EDX2000A Automatic Micro-area Film Thickness Analyzer is a top-illuminate film thickness tester specially developed by Drawell, which best exemplifies its multiple years of layer film thickness measurement technology. Compared with the traditional coating thickness analyzer, it not only performs more excellently on the conventional plating, but also better meets the needs of non-contact micro-area coating thickness testing in industries such as semiconductor, chip and PCB.
Spesifikasi: Measurable range of coating: 3Li~92U Element detection range: 13AI~92U Number of elements to bedetected simultaneously: 24 elements, and more than five coatings can be analyzed at the same time Detection limit: The thinnest metal coating can reach 0.005μm Thickness range : Analysis coating thickness is generally within 50μm(variable for different materials) Standard deviation of thickness: RSD<3% Content test range: 0.1%–99.99% Content detection accuracy: 0.5% Content stability: The repeatability of multiple measurements can reach 0.5% Detection time : 5-40 seconds Lifting range of Z-axis of platform: 0~140mm Detector and resolution: 25mm²Be window Fast- SDD semiconductor detector with resolution140±5eV Multichannl analyser: DMCA digital multi-channel analysis technology with 4096 channels Collimator: Optional 0.1*0.3mm,φ0.2mm,φ0.3mm,φ0.5mm and other apertures Minimum test area: 0.02mm² Sample observation: Equipped with CCD colorful camera, the image can be magnified up to 25 times, which can realize clear positioning of tiny samples Sample moving platform: Full-automatic high-precision multi-point TEST XY mobile platform Focus: Laser adjustment of height with variable camera focusing Analytical method: Energy Dispersive X-ray Fluorescence Analysis Method combining FP and EC Methods Security : Dual safety protection facilities:anti-collision laser detector and sensor detecting sample chamber cover opening and closing; There is no radiation in standby mode, the radiation level during operation is far lower than the international safety standard, and it is equipped with software interlocking device. Dimensions: 485(W)×588(D)×505(H)mm Sample chamber dimensions: 430(W)×400(D)×140(H)mm Ambient temperature and humidity: 15℃~30℃,≤70% Operating power supply: AC 220V±5V, it is recommended to configure AC purified regulated power supply Instrument weight: 60kg
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